Thanks skperformance, yes the vaccum works, everything works fine, I have no idea why the check engine light keep coming on, I have cleaned the egr valve, egr modulator, even the hose is good. I have this car with 178K miles, at 170K valve start to made some click noise, so I adjusted it by changing the right stem, now is smooth but at 8K miles later the check engine light came on and I check with the scanner, give me a code PO401(insufficent flow on EGR).