I had similar problem with VSC and CEL indicators and overdrive. When I checked the MAF sensor I saw that one side of the glass tip on the sensor was very dirty. I dipped that sensor glass tip in cleaning alcohol and then cleaned it with a fine brush to remove all the dirty stuffs. The air filter was also dirty so I replaced with a new air filter. Happy to report that the problem associated with VSC and CEL indicators and overdrive was gone.
Forgot to mention that mine is 2002 RX300 all wheel drive.